Intern
Lehrstuhl für Informatik III

Dr. rer. nat. Mathias Dümmler


 

 

Aug 1997 - Jun 2001

Dissertation:

Modeling and Optimization of Cluster Tools in Semiconductor Manufacturing

Publications

2004[ to top ]
  • Modeling and Optimization of Cluster Tools in Semiconductor Manufacturing. Technical Report (PhD dissertation), . Dümmler, Matthias. PhD dissertation. University of Wuerzburg, 2004, February.
2000[ to top ]
  • Analysis of the Short Term Impact of Changes in Product Mix. Technical Report (254), . Dümmler, Matthias; Rose, Oliver. University of Wuerzburg, 2000.
  • Analysis of the short term impact of changes in product mix. Dümmler, Matthias; Rose, Oliver. In International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM 2000), pp. 133–138. 2000.
1999[ to top ]
  • A Numerical Analysis of the M/D^b/N Queueing System. Technical Report (235), . Dümmler, Matthias; Vicari, Norbert. University of Wuerzburg, 1999.
  • Simulation und Leistungsbewertung von Cluster Tools in der Halbleiterfertigung. Technical Report (231), . Dümmler, Matthias. University of Wuerzburg, 1999.
  • Using Simulation and Genetic Algorithms to Improve Cluster Tool Performance. Technical Report (227), . Dümmler, Matthias. University of Wuerzburg, 1999.
  • Simulation und Leistungsbewertung von Cluster Tools in der Halbleiterfertigung. Dümmler, Matthias. In 13. Symposium Simulationstechnik, pp. 73–78. 1999.
  • Using simulation and genetic algorithms to improve cluster tool performance. Dümmler, Matthias. In Winter Simulation Conference 1999, pp. 875–879. 1999.
  • Using discrete-time analysis in the performance analysis of manufacturing systems. Dümmler, Matthias; Schömig, Alexander. In International Conference on Semiconductor Manufacturing Operational Modeling and Simulation (SMOMS ’99), pp. 3–8. 1999.
1998[ to top ]
  • Using Discrete-time Analysis in the Performance Evaluation of Manufacturing Systems. Technical Report (215), . Dümmler, Matthias. University of Wuerzburg, 1998.
  • Analysis of the Interdeparture Process of a Batch Service Queueing System. Technical Report (210), . Dümmler, Matthias. University of Wuerzburg, 1998.
1997[ to top ]
  • Discrete-time analysis of batch servers with bounded idle time and two job classes. Technical Report (162), . Dümmler, Matthias; Schömig, Alexander K. University of Wuerzburg, 1997.
  • Discrete-time analysis of batch servers with two job classes. Dümmler, Matthias; Schömig, Alexander K. In 1st World Congress on Systems Simulation. Singapore, 1997.